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Hafnium (Hf) is a lustrous, silver grey metal. Hafnium-based thin films are used as an insulator in the newer generations of semiconductors. The thin film prevents copper diffusion into silicon. Amorphous hafnium oxide has a high dielectric constant, it allows education of the gate leakage current and improves performance of the electronics.

Hafnium is found in zirconium minerals; it is difficult to separate these 2 elements due to their chemical resemblance. Our hafnium sputtering target is made from refined crystal bar which ensures low zirconium content, high purity and high reliability.
Unit of Measure

Specifications

Material

 N/A Hafnium

Purity

 N/A 4N (99.99%) pure, excluding Zirconium (Zr) ACH05: Zirconium (Zr) < 0.5 wt% ACH10: Zirconium (Zr) < 1.0 wt%

Elements

 N/A Aluminum (Al) Antimony (Sb) Arsenic (As) Barium (Ba) Beryllium (Be) Bismuth (Bi) Boron (B) Bromine (Br) Cadmium (Cd) Calcium (Ca) Cerium (Ce) Cesium (Cs) Chlorine (Cl) Chromium (Cr) Cobalt (Co) Copper (Cu) Dysprosium (Dy) Erbium (Er) Europium (Eu) Fluorine (F) Gadolinium (Gd) Gallium (Ga) Germanium (Ge) Gold (Au) Hafnium (Hf) Holmium (Ho) Indium (In) Iodine (I) Iridium (Ir) Iron (Fe) Lanthanum (La) Lead (Pb) Lithium (Li) Lutetium (Lu) Magnesium (Mg) Manganese (Mn) Mercury (Hg) Molybdenum (Mo) Neodymium (Nd) Nickel (Ni) Niobium (Nb) Osmium (Os) Palladium (Pd) Phosphorus (P) Platinum (Pt) Potassium (K) Praseodymium (Pr) Rhenium (Re) Rhodium (Rh) Rubidium (Rb) Ruthenium (Ru) Samarium (Sm) Scandium (Sc) Selenium (Se) Silicon (Si) Silver (Ag) Sodium (Na) Strontium (Sr) Sulfur (S) Tantalum (Ta) Tellurium (Te) Terbium (Tb) Thallium (Tl) Thorium (Th) Thulium (Tm) Tin (Sn) Titanium (Ti) Tungsten (W) Uranium (U) Vanadium (V) Ytterbium (Yb) Yttrium (Y) Zinc (Zn) Zirconium (Zr)

Dimensions

Maximum Diameter

 N/A 17.5 in

Maximum Length

 N/A 55 in

Maximum Width

 N/A 16 in

Grain Size

 N/A 28 µm

Typical GDMS Analysis for ACH10 Sputtering Target

Concentration of Element Lithium (Li)

 N/A <0.005 ppm

Concentration of Element Beryllium (Be)

 N/A <0.001 ppm

Concentration of Element Boron (B)

 N/A 0.002 ppm

Concentration of Element Fluorine (F)

 N/A <0.05 ppm

Concentration of Element Sodium (Na)

 N/A 0.02 ppm

Concentration of Element Magnesium (Mg)

 N/A <0.01 ppm

Concentration of Element Aluminum (Al)

 N/A 0.13 ppm

Concentration of Element Silicon (Si)

 N/A 0.38 ppm

Concentration of Element Phosphorus (P)

 N/A <0.005 ppm

Concentration of Element Sulfur (S)

 N/A 0.08 ppm

Concentration of Element Chlorine (Cl)

 N/A <0.05 ppm

Concentration of Element Potassium (K)

 N/A <0.01 ppm

Concentration of Element Calcium (Ca)

 N/A <0.01 ppm

Concentration of Element Scandium (Sc)

 N/A <0.5 ppm

Concentration of Element Titanium (Ti)

 N/A 0.07 ppm

Concentration of Element Vanadium (V)

 N/A <0.005 ppm

Concentration of Element Chromium (Cr)

 N/A 0.16 ppm

Concentration of Element Manganese (Mn)

 N/A <0.005 ppm

Concentration of Element Iron (Fe)

 N/A 3.7 ppm

Concentration of Element Cobalt (Co)

 N/A 0.03 ppm

Concentration of Element Nickel (Ni)

 N/A 0.77 ppm

Concentration of Element Copper (Cu)

 N/A 0.06 ppm

Concentration of Element Zinc (Zn)

 N/A <0.01 ppm

Concentration of Element Gallium (Ga)

 N/A <0.01 ppm

Concentration of Element Germanium (Ge)

 N/A <0.01 ppm

Concentration of Element Arsenic (As)

 N/A <0.005 ppm

Concentration of Element Selenium (Se)

 N/A <0.05 ppm

Concentration of Element Bromine (Br)

 N/A <0.05 ppm

Concentration of Element Rubidium (Rb)

 N/A <0.005 ppm

Concentration of Element Strontium (Sr)

 N/A <0.05 ppm

Concentration of Element Yttrium (Y)

 N/A <0.05 ppm

Concentration of Element Zirconium (Zr)

 N/A ~0.54 wt %

Concentration of Element Niobium (Nb)

 N/A 0.07 ppm

Concentration of Element Molybdenum (Mo)

 N/A 0.2 ppm

Concentration of Element Ruthenium (Ru)

 N/A <0.005 ppm

Concentration of Element Rhodium (Rh)

 N/A <0.01 ppm

Concentration of Element Palladium (Pd)

 N/A <0.05 ppm

Concentration of Element Silver (Ag)

 N/A <0.005 ppm

Concentration of Element Cadmium (Cd)

 N/A <0.05 ppm

Concentration of Element Indium (In)

 N/A <0.005 ppm

Concentration of Element Tin (Sn)

 N/A <0.05 ppm

Concentration of Element Antimony (Sb)

 N/A <0.05 ppm

Concentration of Element Tellurium (Te)

 N/A <0.05 ppm

Concentration of Element Iodine (I)

 N/A <0.01 ppm

Concentration of Element Cesium (Cs)

 N/A <0.001 ppm

Concentration of Element Barium (Ba)

 N/A <0.005 ppm

Concentration of Element Lanthanum (La)

 N/A <0.005 ppm

Concentration of Element Cerium (Ce)

 N/A <0.005 ppm

Concentration of Element Praseodymium (Pr)

 N/A <0.005 ppm

Concentration of Element Neodymium (Nd)

 N/A <0.005 ppm

Concentration of Element Samarium (Sm)

 N/A <0.005 ppm

Concentration of Element Europium (Eu)

 N/A <0.005 ppm

Concentration of Element Gadolinium (Gd)

 N/A <0.005 ppm

Concentration of Element Terbium (Tb)

 N/A <0.005 ppm

Concentration of Element Dysprosium (Dy)

 N/A <0.005 ppm

Concentration of Element Holmium (Ho)

 N/A <0.005 ppm

Concentration of Element Erbium (Er)

 N/A <0.005 ppm

Concentration of Element Thulium (Tm)

 N/A <0.005 ppm

Concentration of Element Ytterbium (Yb)

 N/A <0.005 ppm

Concentration of Element Lutetium (Lu)

 N/A <0.005 ppm

Concentration of Element Hafnium (Hf)

 N/A Matrix ppm

Concentration of Element Tantalum (Ta)

 N/A 5 ppm

Concentration of Element Tungsten (W)

 N/A 0.25 ppm

Concentration of Element Rhenium (Re)

 N/A <0.01 ppm

Concentration of Element Osmium (Os)

 N/A <0.05 ppm

Concentration of Element Iridium (Ir)

 N/A <0.1 ppm

Concentration of Element Platinum (Pt)

 N/A <0.1 ppm

Concentration of Element Gold (Au)

 N/A <0.05 ppm

Concentration of Element Mercury (Hg)

 N/A <0.05 ppm

Concentration of Element Thallium (Tl)

 N/A <0.01 ppm

Concentration of Element Lead (Pb)

 N/A <0.01 ppm

Concentration of Element Bismuth (Bi)

 N/A <0.01 ppm

Concentration of Element Thorium (Th)

 N/A 0.007 ppm

Concentration of Element Uranium (U)

 N/A <0.001 ppm